EZ4 Spin Coater
The LEBO Science EZ4 Spin Coater is a high-performance and compact spin coater designed for uniform thin-film coating. Its small footprint allows installation inside a fume hood or glove box. The upgraded control system can store up to five coating recipes, each consisting of five programmable spin steps.
Specification
-
The EZ4 Spin Coater combines precision and compact design, making it suitable for research and laboratory environments. With programmable spin control and multiple vacuum chuck options, it provides flexibility for various substrate sizes and coating requirements. Its anodized aluminum body ensures durability, while the oil-free vacuum pump delivers quiet and stable operation.
Spin speed range: 100 – 9999 RPM
-
Spin speed resolution: 1 RPM
-
Acceleration range: 100 – 9999 RPM/s
-
Maximum step time: 3000 s
-
Chamber size: 134 mm
-
Maximum wafer size: 4 inch (100 mm)
-
Vacuum chuck: 3 standard sizes (Ø8 mm, 15 mm, 55 mm), custom available
-
Spin control: Programmable, 5 recipes × 5 steps
-
Power supply: AC 110–230 V, adjustable
-
Dimensions: 250 × 210 × 200 mm
Description
The EZ4 Spin Coater combines precision and compact design, making it suitable for research and laboratory environments. With programmable spin control and multiple vacuum chuck options, it provides flexibility for various substrate sizes and coating requirements. Its anodized aluminum body ensures durability, while the oil-free vacuum pump delivers quiet and stable operation.
Features:
-
Supports up to 5 spin programs, each with 5 steps
-
Substrate sizes: 1 cm to 4-inch wafers
-
Coating capability up to 4-inch wafers
-
Anodized aluminum shell for durability
-
Equipped with three aluminum vacuum chucks (Ø8 mm, 15 mm, 55 mm)
-
LCD panel with English instruction manual
-
Oil-free vacuum pump with low-noise operation